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In this paper a nonlinear controller is going to be designed for micro-beam’s deflections under mechanical shock effects. The micro-beam is supposed to undergo mechanical shocks. Mechanical shocks are one of the failure sources and the controller is to considerably suppress shock’s unfavorable effects. Half-Sine, rectangular and triangular pulses are chosen as reference shock signals to represent true complicated shock signals in nature which consist of different harmonics. Two layers of electrodes are placed in both sides of the micro-beam and they are used to actuate the micro-beam by different voltage levels. Upper layer is specifically meant for control purpose. Nonlinear equations governing micro-beam’s deflection dynamics are derived, discretized by Galerkin method to a set of nonlinear duffing type ODE and used to investigate micro-beams response to each shock input signal. Controller design is based on a simple nonlinear model formed by micro-beam’s first mode shape. Proper second order behavior is generated by feedback linearization method as controller logic. Finally controller performance and shock rejecting capability is evaluated by numerical simulations. Controller is shown to be very effective in diminishing shock unfavorable effects and postponing pull-in instability by numerical simulations.

Keywords: Vibrations, Feedback Linearization, Microbeam, Mechanical Shock, Pull-in instability

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