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In this paper, squeeze film damping in a micro-beam resonator based on micro-polar fluid theory has been investigated. The proposed model for this study consists of a clamped-clamped micro-beam suspended between two fixed stratums. The gap between the micro-beam and stratums is filled with air. Equation of motion governing the transverse deflection of the micro-beam based on strain gradient theory and also non-linear Reynolds equation of the fluid field based on micro-polar theory have been non-dimensionalized, linearized and solved simultaneously to calculate the quality factor of the squeeze film damping. The effect of non-dimensional length scale parameter of the air and micro-beam for different values of micro-polar coupling parameter has been investigated. It has been shown that applying micro-polar theory underestimates and also applying strain gradient theory overestimates the values of quality factor that are obtained in the case of classic theory. The quality factor of the squeeze film damping for different values of non-dimensional length of the beam, squeeze number and non-dimensional pressure have been calculated and compared to the obtained values of quality factor based on classic theory.

Keywords: MEMS, Micro-polar theory, Squeeze film damping

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