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Circular micro-plates are used in microelectromechanical systems (MEMS) such as micro-pumps and ultrasonic transducers due to their special geometry. One of the most important problems with electrostatic micro-actuators is pull-in instability which prevents large displacements. Stabilization in beyond pull-in displacements can be attained using an appropriate controller. This paper presents a position control problem for an electrostatic micro-actuator consisting two circular clamped micro-plates to enhance the stroke and speed up the input commands. To consider the modeling error and geometric uncertainties, a fuzzy controller is applied. First, the equation of the plates vibration is derived using Lagrange equation with single mode assumption. Fuzzy rule-base is constructed according to static and dynamic simulations. Genetic algorithm is utilized for finding the optimum parameters of the controller to accelerate accomplishing the commands. Finally, the maximum voltage of the plates is fitted with a function using the optimization results for full range gap commands. The performance of the fuzzy controller along with this function is depicted applying step, multiple step and chirp commands. The obtained results show that the objective has been met well.

Keywords: Double Circular Micro-plates, Beyond Pull-in Stabilization, Fuzzy Control, Optimization, Electrostatic Actuator

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