With the development of micro-mechanical systems, human became interested in concentrating on the small-scale impact on the flow and heat transfer in micro-channels. A micro-channel is required for a gas sensor to guide the gas flow. Reducing the size of channel has lead the scientist to concentrate on micro-sensor. Metal oxide gas micro-sensors are used to detect gases such as O3, SO2, CO2, NO, NH3, CH4 and etc. Metal oxide gas micro-sensors are small in size, low cost in fabrication and consume little power. The purpose of the current study is to numerically investigate the micro-channel wall thickness and diameter on gas inlet temperature under the influence of thermal creeping. The governing nonlinear differential equations, mass, momentum, energy, and species, are coupled and solved by a commercial code. The channel is assumed to be two dimensional. Since the Knudsen number is between 0.01 and 0.1, the slip boundary condition, Maxwell equation, is utilized. The result shows that as wall thickness increases the gas inlet temperature increases and temperature difference between gas inlet and outlet decreases. On the other hand as channel diameter decreases the gas inlet temperature increases.

Keywords: micro-channel, thermal creep, thermal simulation, slip condition

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