1- University of Tehran
2- Iran University of Science and Technology , majid_rajabi@iust.ac.ir
Abstract: (918 Views)
Objective: Advances in microelectromechanical (MEMS) technologies over the past few decades have contributed to the rapid development of a wide range of microfluidic devices with different functionalities. Fluids are driven through microfluidic systems, therefore, in the current research, it is intended to parametrically investigate the effects of the main parameters, namely length, width and angle of attack of valves, piezoelectric length and applied voltage. Method: The approach of the present research is applied and analytical-experimental with numerical simulations where the tensile force is calculated using COMSOL Multiphysics software and the equations are calculated using the fully coupled algorithm in COMSOL Multiphysics. Findings: The results of the present research show that the main parameters significantly affect the performance of the designed micro pump. So that the applied voltage is 400 volts, the angle of attack is 45 degrees and the width of the valves is 6 micrometers, respectively for the piezoelectric length of 4, 2 and 5 mm, the flow rate is 6. 0.6, 9.6 and 16.6 microliters per minute are obtained. For valve widths of 6 and 8 micrometers, optimal attack angles of 60 and 65 degrees, the corresponding flow rates are 11.11 and 5.9 microliters per minute, respectively. Conclusion: Based on the results of the present research and the investigation of the behavior of the micropump and its output flow rate changes in different working conditions, as the length of the valves increases, the flow rate provided increases. Finally, there is a favorable condition for the width and angle of attack of the valves. This optimal width does not depend on the flow speed.
Article Type:
Original Research |
Subject:
Micro & Nano Systems Received: 2024/05/22 | Accepted: 2024/09/20 | Published: 2024/05/30