[1] S. D. Senturia, Microsystem Design, pp. 3-29, New York: Springer US, 2007.
[2] Z. Syed, P. Aggarwal, C. Goodall, X. Niu, N. El-Sheimy, A new multiposition calibration method for MEMS inertial navigation systems, Measurement Science and Technology, Vol. 18, No. 7, pp. 1897, 2007.
[3] H. A. Tilmans, W. De Raedt, E. Beyne, MEMS for wireless communications: from RF-MEMS components to RF-MEMS-SiP, Journal of Micromechanics and Microengineering, Vol. 13, No. 4, pp. S139, 2003.
[4] M. Mojahedi, M. T .Ahmadian, K. Firoozbakhsh, Static deflection and pullin instability analysis of an electrostatically actuated mirocantilever gyroscope considering geometric nonlinearities, Journal of Mechanical Science and Technology, Vol. 27, No. 8, pp. 2425-2434, 2013.
[5] K. Liu, W. Zhang, W. Chen, K. Li, F. Dai, F. Cui, X. Wu, G. Ma, Q. Xiao, The development of micro-gyroscope technology, Journal of Micromechanics and Microengineering, Vol. 19, No. 11, pp. 113001, 2009.
[6] M. Esmaeili, N. Jalili, M. Durali, Dynamic modeling and performance evaluation of a vibrating beam microgyroscope under general support motion, Journal of Sound and Vibration, Vol. 301, No. 1, pp. 146-164, 2007.
[7] M. Rasekh, S. Khadem, Design and performance analysis of a nanogyroscope based on electrostatic actuation and capacitive sensing, Journal of Sound and Vibration, Vol. 332, No. 23, pp. 6155-6168, 2013.
[8] M. Ghommem, A. Nayfeh, S. Choura, F. Najar, E. Abdel-Rahman, Modeling and performance study of a beam microgyroscope, Journal of Sound and Vibration, Vol. 329, No. 23, pp. 4970-4979, 2010.
[9] S. Pamidighantam, R. Puers, K. Baert, H. A. Tilmans, Pull-in voltage analysis of electrostatically actuated beam structures with fixed–fixed and fixed–free end conditions, Journal of Micromechanics and Microengineering, Vol. 12, No. 4, pp. 458, 2002.
[10] M. Mojahedi, M. Ahmadian, K. Firoozbakhsh, Dynamic pull-in instability and vibration analysis of a nonlinear microcantilever gyroscope under step voltage considering squeeze film damping, International Journal of Applied Mechanics, Vol. 5, No. 03, pp. 1350032, 2013.
[11] X. Guo, D. Fang, X. Li, Measurement of deformation of pure Ni foils by speckle pattern interferometry, Mechanics and Engineering, Vol. 27, No. 2, pp. 21-25, 2005.
[12] A. W. McFarland, J. S. Colton, Role of material microstructure in plate stiffness with relevance to microcantilever sensors, Journal of Micromechanics and Microengineering, Vol. 15, No. 5, pp. 1060, 2005.
[13] R. A. Toupin, Elastic materials with couple-stresses, Archive for Rational Mechanics and Analysis, Vol. 11, No. 1, pp. 385-414, 1962.
[14] W. Koiter, Couple-Stresses in the Theory of Elasticity, I & II, Proceedings of the Koninklijke Nederlandse Academie van Weteschappen, Vol. 67, pp. 17- 44 , 1969.
[15] F. Yang, A. Chong, D. C. C. Lam, P. Tong, Couple stress based strain gradient theory for elasticity, International Journal of Solids and Structures, Vol. 39, No. 10, pp. 2731-2743, 2002.
[16] R. Mindlin, N. Eshel, On first strain-gradient theories in linear elasticity, International Journal of Solids and Structures, Vol. 4, No. 1, pp. 109-124, 1968.
[17] N. Fleck, J. Hutchinson, A phenomenological theory for strain gradient effects in plasticity, Journal of the Mechanics and Physics of Solids, Vol. 41, No. 12, pp. 1825-1857, 1993.
[18] D. C. Lam, F. Yang, A. Chong, J. Wang, P. Tong, Experiments and theory in strain gradient elasticity, Journal of the Mechanics and Physics of Solids, Vol. 51, No. 8, pp. 1477-1508, 2003.
[19] M. Kahrobaiyan, M. Asghari, M. Ahmadian, Strain gradient beam element, Finite Elements in Analysis and Design, Vol. 68, pp. 63-75, 2013.
[20] M. H. Ghayesh, H. Farokhi, G. Alici, Size-dependent performance of microgyroscopes, International Journal of Engineering Science, Vol. 100, pp. 99-111, 2016.
[21] J. N. Reddy, Energy Principles and Variational Methods in Applied Mechanics, pp. 48-117, New York, John Wiley & Sons, 2017.
[22] M. Moghimi Zand, M. Ahmadian, Dynamic pull-in instability of electrostatically actuated beams incorporating Casimir and van der Waals forces, Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, Vol. 224, No. 9, pp. 2037-2047, 2010.