---

In this paper, pull-in instability of a cantilever beam type nanoactuator made of the functionally graded material (FGM) based on higher order modified strain gradient theory investigated. It is assumed that the functionally graded beam, made of germanium and silicon, follows the volume fraction definition and law of mixtures, and its properties change as a power function through its thickness. By changing the germanium constituent volume fraction percent of the nano-beam, five different types of the nano-beams are investigated. The influences of the volume fraction index, length scale parameter and the intermolecular forces, on the pull-in instability are examined. Principle of minimum total potential energy used to derive the nonlinear governing differential equation and consistent boundary conditions which is then solved using the differential quadrature method (DQM). The present analysis is validated through direct comparisons with published other research methods and experimental results and after comparison excellent agreement has been achieved between new solution method and other experimental and numerical solution results. Besides, the results demonstrate that size effect and amount of volume fraction have a substantial impact on the pull-in instability behavior of beam-type nanoactuator.

---

Consideration of dynamic and static behavior of structures in nano and micro scale for analysis and predicting of their performance and accuracy have more importance. In this study, the effect of size and intermolecular van der Waals force on dynamic behavior of torsional nanomirror considering bending-torsion two degree of freedom model using the higher order modified couple stress theory has been investigated. First considering the higher order modified couple stress theory and intermolecular van der Waals force, equation of motion of system is developed, afterwards using Rung-Kuta method, this equations is solved and dynamic performance of nanomirror and its phase portraits have been obtained. Also translational and torsional natural frequencies of system considering applied voltage are investigated. So pull-in instability parameters of system are considered and their dependency upon van der Waals force and size effects are determined. Results demonstrate that equilibrium points of system include center points and focus points that phase portraits related to these points exhibit periodic orbits and heteroclinic orbits. Also size effect and modified couple stress model on amplitude and frequency of vibration of system have been investigated. Proposed model in this study is able to predict experimental results with higher precision than previous classic models and reduce the difference between past theories and empirical results.