RT - Journal Article
T1 - Flexural Sensitivity Analysis of Atomic Force Microscope Made of Functionally Graded Materials Based on Modified Couple Stress Theory
JF - mdrsjrns
YR - 2019
JO - mdrsjrns
VO - 19
IS - 6
UR - http://mme.modares.ac.ir/article-15-22553-en.html
SP - 1457
EP - 1466
K1 - Functionally Graded Materials
K1 - Modified Couple Stress Theory
K1 - Length Scale Parameter
K1 - Atomic Force Microscop
AB - In this article, the sensitivity and resonant frequency of the atomic force microscope made of functionally graded materials is investigated by couple stress theory (MCST). In MCST, the size effect of the system is taking into account by means of the material length scale parameter. is made of a mixture of metal and ceramic with properties varying through the thickness following a simple In this work, due to the kinematic energy and potential energy of , the governing equations of motion and corresponding boundary conditions are derived on the basis of Hamilton principle by considering Euler-Bernoulli beam theory. Based on the results, it is clear that when the contact stiffness increases, the sensitivity of the system decreases, and resonant frequency increases. Moreover, when the thickness comes approximately close to material length scale parameter, the difference between MCST and classical continuum mechanic becomes significant. Furthermore, in low contact stiffness, increasing the power reduces the sensitivity of , while in high contact stiffness, increasing the power increases the sensitivity of the system. Results also show that at each value of contact stiffness, as ceramic volume fraction increases the resonant frequency will be increased, too.
LA eng
UL http://mme.modares.ac.ir/article-15-22553-en.html
M3
ER -