TY - JOUR
T1 - Flexural Sensitivity Analysis of Atomic Force Microscope Made of Functionally Graded Materials Based on Modified Couple Stress Theory
TT - بررسی حساسیت خمشی میکروتیر میکروسکوپ نیروی اتمی ساختهشده از مواد مدرج تابعی براساس تئوری تنش کوپل بهبودیافته
JF - mdrsjrns
JO - mdrsjrns
VL - 19
IS - 6
UR - http://mme.modares.ac.ir/article-15-22553-en.html
Y1 - 2019
SP - 1457
EP - 1466
KW - Functionally Graded Materials
KW - Modified Couple Stress Theory
KW - Length Scale Parameter
KW - Atomic Force Microscop
N2 - In this article, the sensitivity and resonant frequency of the atomic force microscope made of functionally graded materials is investigated by couple stress theory (MCST). In MCST, the size effect of the system is taking into account by means of the material length scale parameter. is made of a mixture of metal and ceramic with properties varying through the thickness following a simple In this work, due to the kinematic energy and potential energy of , the governing equations of motion and corresponding boundary conditions are derived on the basis of Hamilton principle by considering Euler-Bernoulli beam theory. Based on the results, it is clear that when the contact stiffness increases, the sensitivity of the system decreases, and resonant frequency increases. Moreover, when the thickness comes approximately close to material length scale parameter, the difference between MCST and classical continuum mechanic becomes significant. Furthermore, in low contact stiffness, increasing the power reduces the sensitivity of , while in high contact stiffness, increasing the power increases the sensitivity of the system. Results also show that at each value of contact stiffness, as ceramic volume fraction increases the resonant frequency will be increased, too.
M3
ER -