Volume 23, Issue 1 (January 2022)                   Modares Mechanical Engineering 2022, 23(1): 25-31 | Back to browse issues page


XML Persian Abstract Print


Download citation:
BibTeX | RIS | EndNote | Medlars | ProCite | Reference Manager | RefWorks
Send citation to:

Kavand H, Koohsorkhi J, askari moghaddam R. Local stresses effect on micro-machined silicon diaphragm on zinc oxide nanowires piezoelectric sensors. Modares Mechanical Engineering 2022; 23 (1) :25-31
URL: http://mme.modares.ac.ir/article-15-59061-en.html
1- Advanced Micro and Nano Research Lab., Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran
2- Advanced Micro and Nano Research Lab., Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran , koohsorkhi@ut.ac.ir
3- Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran
Abstract:   (673 Views)
The electrical properties of nanostructured piezoelectric materials have attracted the attention of many researchers in the last decade. These features are used in piezoelectric micro-sensors. Mechanical propulsion is usually the result of contact between a piezoelectric surface and a foreign object. In this paper, the effect of mechanical propulsion using an air wave (sound) or vacuum on a silicon diaphragm is investigated. The local stresses created on the diaphragm due to the impact of an air wave have a significant effect on the peak-to-peak voltage of the piezoelectric sensor, which can be measured by measuring changes in this parameter. To investigate this, a micromachined diaphragm of silicon was examined and it was found that fabricating a piezoelectric sensor on a thin and patterned diaphragm could increase the peak-to-peak voltage by about 1.3 times. Detection of these stresses using piezoelectric material layered on the thin and formable diaphragm can act as a piezoelectric microphone or a barometer that the presence of microstructures on the diaphragm will increase their sensitivity.
Full-Text [PDF 606 kb]   (298 Downloads)    
Article Type: Original Research | Subject: Micro & Nano Systems
Received: 2022/01/27 | Accepted: 2022/08/14 | Published: 2022/12/31

References
1. C. Sun, J. Shi, D. J. Bayerl, and X. Wang, "PVDF microbelts for harvesting energy from respiration," Energy Environ. Sci., vol. 4, no. 11, pp. 4508-4512, 2011. [DOI:10.1039/c1ee02241e]
2. A. Ghasemi Kordlar, J. Koohsorkhi, E. TaiediNejad; "Barium titanate nanorods on micro-machined silicon substrate for performance enhancement of piezoelectric Nanogenerators (NGs)" Solid-State Electronics, vol.186,p108168, 2021. [DOI:10.1016/j.sse.2021.108168]
3. Z. L. Wang and W. Wu, "Nanotechnology-enabled energy harvesting for self-powered micro-/nanosystems," Angew. Chemie Int. Ed., vol. 51, no. 47, pp. 11700-11721, 2012. [DOI:10.1002/anie.201201656]
4. M. C. Akgun, Y. E. Kalay, and H. E. Unalan, "Hydrothermal zinc oxide nanowire growth using zinc acetate dihydrate salt," J. Mater. Res., vol. 27, no. 11, pp. 1445-1451, 2012. [DOI:10.1557/jmr.2012.92]
5. Q. Wang, Y. Qiu, D. Yang, B. Li, X. Zhang, Y. Tang, L. Hu, "Improvement in piezoelectric performance of a ZnO nanogenerator by modulating interface engineering of CuO-ZnO heterojunction", Appl. Phys. Lett. 113, 2018. [DOI:10.1063/1.5035309]
6. R. Parize, J. Daniel Garnier, E. Appert, O. C. Pluchery, and V. Consonni, "Effects of Polyethylenimine and Its Molecular Weight on the Chemical Bath Deposition of ZnO Nanowires", ACS Omega; 3(10): 12457-12464, 2018. [DOI:10.1021/acsomega.8b01641]
7. آرمین حیدری، سارا درباری، "برداشت انرژی پیشرفته، استفاده از نانوژنراتور بر اساس اکسید روی nanosheet جاسازی شده در بلور فوتونی"، مهندسی برق، مدرس، دوره۱۳ شماره۳، ص: ۹-۱۳، ایران، 1392.
8. بیتا سلیمی قادی ، مهدی گل سرخ تبار امیری، "پروتکل مسیریابی انرژی کارا برای شبکه های بی سیم انرژی برداشت بدن"نشریه: مهندسی پزشکی زیستی، شماره 3، ایران، 1396.
9. M. C. Akgun, Y. E. Kalay, and H. E. Unalan, "Hydrothermal zinc oxide nanowire growth using zinc acetate dihydrate salt," J. Mater. Res., vol. 27, no. 11, pp. 1445-1451, 2012. [DOI:10.1557/jmr.2012.92]
10. امیر قاسمی کردلر، جواد کوهسرخی، حامد کاوند، "رشد نانومیله های اکسید روی بر روی میکرو ساختارهای دوار و هم مرکز سیلیکانی برای ساخت نانوژنراتورها" کنفرانس ملی مهندسی شیمی و نانو فناوری، ایران، 1399.
11. M. R. Hasan, S. H. Baek, K. S. Seong, J. H. Kim, and I. K. Park, "Hierarchical ZnO Nanorods on Si Micropillar Arrays for Performance Enhancement of Piezoelectric Nanogenerators," ACS Appl. Mater. Interfaces, vol. 7, no. 10, pp. 5768-5774, 2015. [DOI:10.1021/am5085379]

Add your comments about this article : Your username or Email:
CAPTCHA

Send email to the article author


Rights and permissions
Creative Commons License This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License.