Measuring topography and flatness of nontransparent rough surfaces using a laser interferometer topography measuring (Zygo) machine is impossible. Due to high accuracy and short measuring time, capacitor probe is a good candidate for measuring topography and flatness of a rough surface. Measuring by a capacitor probe is an average area measuring method and it is suitable for measurment of machinment processes such as ion or blast figure correction, computer control polishing (CCP) and magnetorheological finishing (MRF) methods. The idea of a rough surface which directly can be used for corrective figuring is generated by measuring flatness and waviness of it through a capacitive probe. Among the area averaging methods, the surface capacitance method can be used to elaborate the idea of corrective figuring of a rough surface. Measuring flatness of a rough surface whose roughness (Ra) is in the range of out of flatness is another technical property of the presented method.

Keywords: Surface Metrology, Capacitance Measurement, Figure Correcting, Precision Machining.