Volume 23, Issue 1 (January 2022)                   Modares Mechanical Engineering 2022, 23(1): 25-31 | Back to browse issues page

‎ 10.52547/mme.23.1.25
‎ 20.1001.1.10275940.1401.23.1.2.0

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Kavand H, Koohsorkhi J, askari moghaddam R. Local stresses effect on micro-machined silicon diaphragm on zinc oxide nanowires piezoelectric sensors. Modares Mechanical Engineering 2022; 23 (1) :25-31
URL: http://mme.modares.ac.ir/article-15-59061-en.html
Local stresses effect on micro-machined silicon diaphragm on zinc oxide nanowires piezoelectric sensors
Hamed Kavand1 , Javad Koohsorkhi * 2, Reza Askari moghaddam3
1- Advanced Micro and Nano Research Lab., Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran
2- Advanced Micro and Nano Research Lab., Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran , koohsorkhi@ut.ac.ir
3- Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran
Abstract:   (833 Views)
The electrical properties of nanostructured piezoelectric materials have attracted the attention of many researchers in the last decade. These features are used in piezoelectric micro-sensors. Mechanical propulsion is usually the result of contact between a piezoelectric surface and a foreign object. In this paper, the effect of mechanical propulsion using an air wave (sound) or vacuum on a silicon diaphragm is investigated. The local stresses created on the diaphragm due to the impact of an air wave have a significant effect on the peak-to-peak voltage of the piezoelectric sensor, which can be measured by measuring changes in this parameter. To investigate this, a micromachined diaphragm of silicon was examined and it was found that fabricating a piezoelectric sensor on a thin and patterned diaphragm could increase the peak-to-peak voltage by about 1.3 times. Detection of these stresses using piezoelectric material layered on the thin and formable diaphragm can act as a piezoelectric microphone or a barometer that the presence of microstructures on the diaphragm will increase their sensitivity.
Keywords: Mechanical stress, Silicon diaphragm, Microstructures, Piezoelectric nanostructures, Zinc oxide nanowires, MEMS
Full-Text [PDF 606 kb]   (391 Downloads)    
Article Type: Original Research | Subject: Micro & Nano Systems
Received: 2022/01/27 | Accepted: 2022/08/14 | Published: 2022/12/31
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