Volume 17, Issue 1 (3-2017)                   Modares Mechanical Engineering 2017, 17(1): 151-160 | Back to browse issues page

XML Persian Abstract Print

Download citation:
BibTeX | RIS | EndNote | Medlars | ProCite | Reference Manager | RefWorks
Send citation to:

Bakhtiari Shahri M, Moeenfard H, Moavenian M. Optimal fuzzy controller design for beyond pull-in stabilization of circular micro-plates. Modares Mechanical Engineering 2017; 17 (1) :151-160
URL: http://mme.modares.ac.ir/article-15-7296-en.html
1- Vakil Abad BLVD Ferdowsi University of Mashhad
Abstract:   (3952 Views)
Circular micro-plates are used in microelectromechanical systems (MEMS) such as micro-pumps and ultrasonic transducers due to their special geometry. One of the most important problems with electrostatic micro-actuators is pull-in instability which prevents large displacements. Stabilization in beyond pull-in displacements can be attained using an appropriate controller. This paper presents a position control problem for an electrostatic micro-actuator consisting two circular clamped micro-plates to enhance the stroke and speed up the input commands. To consider the modeling error and geometric uncertainties, a fuzzy controller is applied. First, the equation of the plates vibration is derived using Lagrange equation with single mode assumption. Fuzzy rule-base is constructed according to static and dynamic simulations. Genetic algorithm is utilized for finding the optimum parameters of the controller to accelerate accomplishing the commands. Finally, the maximum voltage of the plates is fitted with a function using the optimization results for full range gap commands. The performance of the fuzzy controller along with this function is depicted applying step, multiple step and chirp commands. The obtained results show that the objective has been met well.
Full-Text [PDF 1201 kb]   (5139 Downloads)    
Article Type: Research Article | Subject: Micro & Nano Systems
Received: 2016/09/25 | Accepted: 2016/12/3 | Published: 2017/01/8

Add your comments about this article : Your username or Email:

Rights and permissions
Creative Commons License This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License.