Modares Mechanical Engineering

Modares Mechanical Engineering

Design, Fabrication and performance of DEP-SAW sensor for measurement of cells aggregation on a lab on chip

Author
Manufacturing Tarbiat Modares University
Abstract
In surface acoustic wave sensors, target cells are trapped by sacrificial layer, containing antigens and antibodies. In this new idea, sacrificial layer is replaced by diectrophoresis electrodes. Fast response and not being disposable and usability for various types of cells are its advantages. In order to design and fabricate the sensor, the optimized values of effective parameters have been investigated. The behavior Love wave - which is used in this sensor - is simulated with lithium Niobate as substrate and ZnO layer as guiding layer. Two types of focus and unfocus interdigital transducer electrodes for sensor are investigated. The results of the sensitivity analysis and its relationship with the sensor displacement are presented. In graphs, results indicate that the focused circular structure is more sensitive, when the number of target cells in the fluid channel is more. The sensor was tested in 142 MHz for healthy and cancerous brain and intestinal cells. The suggested sensor has good results for measurement of cells aggregation. Wave power loss in transmission from sender to receiver ports and frequency shift are two special properties for detecting healthy and cancerous cells. Results show 80 and 90 KHz decrease in frequency and 4.99 and 6.69 dB loss decrease in cancerous cells comparing to healthy cells in brain and intestinal cells respectively. In this sensor, trapping, detecting and measurement of aggregation, happens in 5-10 second, which is an outstanding result compare to 10 – 15 minutes in conventional methods.
Keywords

[1] J. W. Strutt, On waves propagated along the plane surface of an elastic solid, Proceedings of the London Mathematical Society, Vol. 17, No. 1, pp. 4-11, 1885.
[2] R. White, F. Voltmer, Direct piezoelectric coupling to surface elastic waves, Applied Physics Letters, Vol. 7, No. 12, pp. 314–316, 1965.
[3] L. Bo, C. Xiao, C. Hualin, Surface acoustic wave devices for sensor applications, Journal of Semiconductors, Vol. 37, No. 2, pp. 1674-4926, 2016.
[4] K. Lange, B. Rapp, M. Rapp, Surface acoustic wave biosensors: a review, Analytical and Bioanalytical Chemistry, Vol. 391, No. 5, pp. 1509–1519, 2008.
[5] S. Powell, A. David, K. Kalantar-Zadeh, Layered surface acoustic wave chemical and bio-sensors, Encyclopedia of Sensors, Melbourne, Australia, RMIT University, pp. 1–18, 2006.
[6] C. Campbell, Teqnique, Device and mobile application, Surface Acoustic Wave Devices and Their Signal Processing Applications, San diego, California Academic press, 1985, pp. 320-325.
[7] W. Welsch, C. Klein, M. V. Schickfus, Development of a surface acoustic wave immunosensor, Analytical Chemistry, Vol. 68, No. 13, pp. 2000–2004, 1996.
[8] R. C. Chang, S. Chu, C. S. Hong, Y. T. Chuang, A study of Love wave devices in ZnO/Quartz and ZnO/LiTaO3 structures, Thin Solid Films, Vol. 498, No. 1–2, pp. 146-151, 2006.
[9] D. Branch, S. Brozik, Low-level detection of a Bacillus anthracis simulant using Love-wave biosensors on 36°YX LiTaO3, Biosensors and Bioelectronics, Vol. 19, No. 8, pp. 849–859, 2004.
[10] P. Kiełczyn´ski, M. Szalewski, A. Balcerzak, Applications of SH surface acoustic waves for measuring the viscosity of liquids in function of pressure and temperatures, Ultrasonics, Vol. 5, pp. 921–924, 2011.
[11] P. Kiełczyn´ski, M. Szalewski, A. Balcerzak, Applications of SH surface acoustic waves for measuring the viscosity of liquids in function of pressure and temperatures, Ultrasonics, Vol. 51, No. 8, pp. 921–924, 2011.
[12] P. Kiełczyn´ski, M. Szalewski, A. Balcerzak, Inverse procedure for simultaneous evaluation of viscosity and density of Newtonian liquids from dispersion curves of Love waves, Journal of Applied Physics, Vol. 116, No. 4, pp. 1-7, 2014.
[13] H. Oh, W. Wang, K. Lee, C. Min, S. Yang, The development of a wireless. Love wave biosensor on 41°YX LiNbO3, Smart Materials And Structures, Vol. 18, pp. 443-749, 2009.
[14] W. Wang, H. Oh, K. Lee, S. Yang, Enhanced sensitivity of wireless chemical sensor based on Love wave mode, Japanese Journal of Applied Physics, Vol. 47, No. 6, pp. 7372–7379, 2008.
[15] H. Wang, Z. Zhao, Love waves in a two-layered piezoelectric/elastic composite plate with an imperfect interface, Archive of Applied Mechanics, Vol. 83, No. 1, pp. 43–51, 2013.
[16] I. Sayago, D. Matatagui, M. J. Fernández, J. Fontecha, I. Jurewicz, R. Garriga, E. Muñoz, Graphene oxide as sensitive layer in Love-wave surface acoustic wave sensors for the detection of chemical warfare agent simulants, Talanta, Vol. 148, pp. 393–400, 2016.
[17] D. Greve, T. Chin, P. Zheng, Surface acoustic wave devices for harsh environment wireless sensing, Sensors, Vol. 13, No. 6, pp. 6910-6935, 2013.
[18] H. Morgan, N. G. Green, AC Electrokinetics, pp. 23-80, Hertfordshire: Institute of Physics, 2003.
[19] Y. Fu, J. Luo, X. Du, A. Flewitt, Y. Li, G. Markx, A. Walton, W. Milne, Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review, Sensor and Actuators B: Chemical, Vol. 143, No. 2, pp. 606–619, 2010.
[20] I. Voiculescu and A. Nordin, Acoustic wave based MEMS devices for biosensing applications, Biosensensor and Bioelectronics, Vol. 33, No. 1, pp. 1-9, 2012.
[21] C. K. Campbell, Surface Acoustic Wave Devices for Mobile and Wireless Communications, San Diego: Mc Master universaity, 1998.