Modares Mechanical Engineering

Modares Mechanical Engineering

Design, Manufacturing, and Comprehensive Dynamic Modeling of a Piezoelectric Pneumatic Servo Valve Based on Compliant Mechanisms

Document Type : Original Research

Authors
Amir Hossein Moradi
Hamed Ghafarirad
Seyed Mehdi Rezaei
Mohammad Zareinejad
Pouya Firuzy Rad
Amirkabir University of Technology
10.48311/mme.24.10.631
Abstract
This article focuses on the design, manufacturing, and dynamic modeling of a piezoelectric pneumatic servo valve based on a compliant mechanism. The use of piezoelectric actuators in these valves, due to their fast dynamic response and high precision, significantly improves the speed of pressure control. To this end, the structure of the pneumatic servo valve and the function of its components were initially investigated. To enhance the valve's orifice opening, a rhombus type compliant mechanism was designed to amplify the displacement range of the piezoelectric actuator. Subsequently, a comprehensive dynamic model of the system was presented. After identification and validating the proposed dynamics, the results of air pressure control for both steady and time-varying reference inputs were provided. Experimental results indicate that the proposed dynamic model for the manufactured valve has a maximum error of 25%. Additionally, frequency analysis results show that the valve has a dynamic bandwidth of 90 Hz and a natural frequency of 56 Hz, highlighting its applicability for high-frequency operations. The results of pressure control demonstrate a step response time of approximately 21 milliseconds at a pressure of 2 bar, indicating its capability to respond to rapid pressure changes. Furthermore, the ability to track input pressures with varying frequencies and amplitudes was also evaluated
Keywords
Piezoelectric Servo Valve
Compliant Mechanism
Pressure Control
Coupled Dynamic Modeling

Subjects

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Modares Mechanical Engineering
Volume 24, Issue 10
September 2024
Pages 631-641